NDLI: Optimization of preventive maintenance scheduling for semiconductor manufacturing systems: models and implementation

Content Provider	IEEE Xplore Digital Library
Author	Xiaodong Yao Fu, M. Marcus, S.I. Fernandez-Gaucherand, E.
Copyright Year	2001
Description	Author affiliation: Inst. for Syst. Res., Maryland Univ., College Park, MD, USA (Xiaodong Yao)
Abstract	Preventive maintenance (PM) is a vital activity in semiconductor manufacturing. A good PM schedule can increase the availability of tools by trading off between the planned unproductive down time versus the risk of much costlier unscheduled down time due to tool failures. Cluster tools are highly integrated systems made up of several processing modules (chambers) mechanically linked together, which can perform a sequence of semiconductor manufacturing processes. We present a two-layer hierarchical modeling framework for addressing the PM optimization problem for cluster tools, i.e., a Markov decision process (MDP) model at the higher level, and a mixed linear programming (LP) model at the lower level. Production planning data such as WIP levels are incorporated in these models. The LP model is solved using optimization packages EasyModeler and OSL. A case study comparing the results with a reference schedule is conducted in the simulation environment AutoSched AP, and numerical results are reported.
Sponsorship	IEEE Control Syst. Soc
Starting Page	407
Ending Page	411
File Size	540082
Page Count	5
File Format	PDF
ISBN	0780367332
DOI	10.1109/CCA.2001.973899
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-09-07
Publisher Place	Mexico
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Preventive maintenance Job shop scheduling Manufacturing systems Optimal scheduling Processor scheduling Semiconductor device manufacture Production planning Computer aided manufacturing Availability Linear programming
Content Type	Text
Resource Type	Article

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