NDLI: Real-time plasma etch control using in-situ sensors and neural networks

Content Provider	IEEE Xplore Digital Library
Author	Stokes, D. May, G.S.
Copyright Year	1999
Description	Author affiliation: Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA (Stokes, D.)
Abstract	Recent work has shown that neural networks offer great promise in modeling complex fabrication processes such as reactive ion etching (RIE). This paper explores the use of neural networks for real-time, model-based feedback control of RIE. This objective is accomplished in part by constructing a predictive model for the system, which can be inverted (or approximately inverted) to achieve the desired control. The efficacy of this approach is demonstrated using experimental data from a SiO/sub 2/ etch process to simulate real-time control of etch rate, uniformity, selectivity, and anisotropy. In addition, using a residual gas analysis system as a sensor, the approach is further demonstrated using actual experimental data acquired during the etch of a GaAs/AlGaAs metal-semiconductor-metal structure. In the latter case, real-time control of the etch rate of the constituent materials is investigated.
Starting Page	779
Ending Page	783
File Size	482426
Page Count	5
File Format	PDF
ISBN	078035446X
DOI	10.1109/CCA.1999.807760
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-08-22
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasma applications Etching Neural networks Fabrication Feedback control Predictive models Anisotropic magnetoresistance Gas detectors Sensor systems Gallium arsenide
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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