NDLI: Electrical characterization and modeling of thin-film humidity sensors

Content Provider	IEEE Xplore Digital Library
Author	Bonavita, A. Caddemi, A. Donato, N. Accordino, P. Galvagno, S. Neri, G.
Copyright Year	2001
Description	Author affiliation: Dipt. di Chimica Industriale e Ingegneria dei Materiali, Messina Univ., Italy (Bonavita, A.)
Abstract	Undoped and Li-doped iron oxide thin films were investigated as humidity sensors. Large variations of the sensor resistance were observed by changing the relative humidity (RH%) between 0 and 100%. The results of an electrochemical impedance spectroscopy (EIS) study performed by measuring the sensor's complex impedance, were analyzed and employed to extract equivalent circuit models. Such models have humidity-dependent element values and their structure has a direct relationship with the sensor physics. The performance of the films and the results of the model simulations are presented and discussed.
Sponsorship	IEEE CAS Soc. Univ. Malta
Starting Page	673
Ending Page	676
File Size	361334
Page Count	4
File Format	PDF
ISBN	0780370570
DOI	10.1109/ICECS.2001.957565
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-09-02
Publisher Place	Malta
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Humidity Thin film sensors Sensor phenomena and characterization Iron Thin film circuits Electric resistance Electrochemical impedance spectroscopy Performance evaluation Electrical resistance measurement
Content Type	Text
Resource Type	Article

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