NDLI: Energy Use in Nanoscale Manufacturing

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Enterprise strategies for reducing the life-cycle energy use and greenhouse gas emissions of personal computers

ESH & Nanotechnology: A Joint Study by the Chemical Industry Vision2020 and the Semiconductor Research Corporation

Novel nanotechnology for environmentally friendly interconnect materials in microelectronic packaging applications

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Ethical Systems in an Age of Accelerating Technological Evolution

From Professional Ethics to Technological Citizenship

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Alternative Power Generation Technologies: Use of Distributed Power for Telecommunications Facilities and Operations

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Meta-analysis of Hazard Criteria Designation for Electronic Waste

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Policy Tools for Electronics Recycling Characteristics of a specific certificate market design

A Process-Based Model of End-of-Life Electronics Recycling Driving Eco-Efficiency-Informed Decisions

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Californian Households - Willingness to Pay for Green PCs

Pricing of End-of-Life Items with Obsolescence

Computer Power Management for Enterprises A Practical Guide for Saving up to $100 per Seat Annually in Electricity

Use of a Computer-Based System to Measure and Manage Energy Consumption in the Home

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Analysis of the Potential Contribution of ICT Services to a Sustainable Society

Solvent Recycling An ecological assessment of the improvements by the ELOSORB technique

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An Environmental Analysis of Injection Molding

Technological Use Histories for Solder Metals

Material Recycling at Product End-of-Life

An Environmentally Benign Process Model Development for Printed Circuit Board Recycling

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Integrating End-of-Life Evaluation in Conceptual Design

Strategies for Cost Effective Implementation of PFC Emissions Reduction Solutions in the Semiconductor Industry

Life Cycle Inventory of a CMOS Chip

Environmental Impact Evaluation Methodology for Emerging Silicon-Based Technologies

Wafer FAB exhaust management strategies

Energy Use in Nanoscale Manufacturing

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Tackling Challenges in Measuring and Communicating Eco-efficiency

SWICO/S.EN.S, the Swiss WEEE recycling systems and best practices from other European systems

Estimation of Videoconference Performance: Approach for Fairer Comparative Environmental Evaluation of ICT Services

Feedstock Recycling Technologies in the Sustainable Recycling of Plastics from End-ofLife Electrical and Electronic Products

Assessing the Landfill Disposal Implication of Discarded Electronic Equipment

Large Scale Co-combustion Demonstration of Electrical and Electronic Shredder Residue at the Wuerzburg Municipal Solid Waste Incinerator (MHKW)

Evaluation of Metal Leaching from End-of-Life Laptop Computers Using the TCLP and Other Standard Leaching Tests

An Agenda to Move Forward E-waste Recycling and Challenges in China

End-of-Life Personal Computer Systems in California: Analysis of Emissions and Infrastructure Needed to Recycle in the Future

The Practice and Challenges of Electronic Waste Recycling in Korea with Emphasis on Extended Producer Responsibility (EPR)

Building a 'Reasonable Steps' Defense: Laboratory Testing

Improvement Plan of Recycling rate of the Electronic & Electrical Equipment with Considering of Economics; Case study of Vacuum Cleaner

Design and Control of material flow networks for the recycling of WEEE

Regional E-waste Reverse Logistics System Based on PCB Recycling Unit

Functionality Test of End-of-Life TFT LCD Panels

A Quantitative Reverse Logistics Model and Waste Application for Electronic Products

An Intelligent Product Disassembly Planning Method

Compliance Key Factors of the EU WEEE Directive

End of life recycling technologies - hard drive impairment

Environmental Impacts On HydroPower Solution Selection

Household Batteries Collection Behavior and the Emotional Aspects of Collection Bin Design

Planning an efficient closed-loop supply chain network: a unified single-phase approach

Regulatory Developments & Issues for Flame Retardants Used in Electrical & Electronic Equipment

The Strategy of Haier's Environmental Development

Two Estimation Methods for Average Domestic Lifespan of Products

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Energy Use in Nanoscale Manufacturing

Content Provider	IEEE Xplore Digital Library
Author	Zhang, T.W. Boyd, S. Vijayaraghavan, A. Dornfeld, D.
Copyright Year	2006
Description	Author affiliation: Dept. of Mech. Eng., California Univ., Berkeley, CA (Zhang, T.W.; Boyd, S.; Vijayaraghavan, A.; Dornfeld, D.)
Abstract	This paper presents an overview of key nanoscale manufacturing technologies, and qualitatively examines their fundamental process requirements with respect to energy demand. The processes requirements are related to semiconductor manufacturing, where applicable, and gaps in our understanding of these processes on the production scale are identified as goals for the research community. Finally, the paper proposes a framework for the systematic analysis of energy use in nanoscale manufacturing processes
Starting Page	266
Ending Page	271
File Size	110343
Page Count	6
File Format	PDF
ISBN	1424403510
ISSN	10952020
DOI	10.1109/ISEE.2006.1650074
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-05-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Manufacturing processes Semiconductor device manufacture Lithography Pulp manufacturing Etching Ultraviolet sources Energy efficiency Nanoscale devices Electron beams Resists
Content Type	Text
Resource Type	Article

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