NDLI: A dedicated multichip module automatic optical inspection system

Content Provider	IEEE Xplore Digital Library
Author	Cohen, R. Dishon, G.
Copyright Year	1990
Description	Author affiliation: Orbot Syst. Ltd., Yavne, Israel (Cohen, R.; Dishon, G.)
Abstract	The design of an automatic optical inspection (AOI) system for multichip modules (MCMs) is discussed. The system differs from AOI tools designed for other applications due to the special characteristics of MCMs. The system consists of two subsystems: image acquisition and image processing. The critical issues concerning the components of each subsystem are discussed together with the different possible solutions. The image acquisition unit acquires the module's image and transforms it into the electronic data that are transferred to the image processor. Acquiring the image involves an XY stage, an illumination module, an optical column, and a sensor. The image processing function is divided into preprocessing and defect detection, both containing sophisticated algorithms that are applied to the image, resulting in a reliable and accurate report of the flaws.<>
Starting Page	51
Ending Page	55
File Size	394846
Page Count	5
File Format	PDF
DOI	10.1109/IEMT9.1990.114979
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1989-02-12
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Multichip modules Automatic optical inspection Optical sensors Image sensors Image processing Lighting Optical design Process control System performance Image resolution
Content Type	Text
Resource Type	Article

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