NDLI: Analysis of Charging Kinetics of Oxide Ceramics under Short Electron Beam Irradiation: Numerical Simulation of Secondary Electron Emission

Content Provider	IEEE Xplore Digital Library
Author	Aoufi, A. Zarbout, K. Damamme, G. Moya, G.
Copyright Year	2008
Description	Author affiliation: UMR CNRS 6242, Univ. Paul Cezanne, Marseille (Zarbout, K.; Moya, G.) \|\| PECM/SMS/MTT, CNRS, St. Etienne (Aoufi, A.) \|\| DAM/DIF, CEA, Bruyeres le Chatel (Damamme, G.)
Abstract	This analysis is connected with the evolution of trapped charges, during electron injection, using a defocused electron beam of a Scanning Electron Microscope especially equipped with a secondary electron low-noise detector. Hence, during pulses of about ten ms, giving injection doses of a few pC, the measurements of the influence induced currents, $I_{ind}(t),$ due to the image charges $Q_{ind}$ (t) in the metallic holder (corresponding to the trapped charges $Q_{p}$ (t) in the sample) and the total secondary electron currents, $I_{sigma}(t),$ can be carried out. Considering the experimental conditions defined by small primary current density $(#10^{4}$ $pA/cm^{2})$ and low surface charge density (#10 $pC/cm^{2}),$ the relation, $I_{0}$ = $I_{ind}(t)$ + $I_{sigma}$ (t) can be verified [1] leading to (after integration over the injection time) a charge balance: $Q_{inj}$ = $Q_{ind}+Q_{sigma}$ = $Q_{p}+Q_{sigma}$ The secondary electron emission yield, see(t) = 1 - { $I_{ind}$ (t) / $[I_{ind}$ $(t)+I_{sigma}$ (t)] }, is experimentally studied as a function of $Q_{p}(t).$ A simulation, which corresponds to a new mathematical model describing the spatial and temporal charge trapping, computes the temporal evolution of the secondary electron emission, see(t), as a function of net trapped charge, $Q_{p}(t),$ for various values of the kinetic energy of the primary electrons. The comparison between experimental results and numerical simulations would permit to evaluate absorption and transfer cross sections as well as mobility of the secondary electrons.
Starting Page	141
Ending Page	144
File Size	1969733
Page Count	4
File Format	PDF
ISBN	9781424425488
DOI	10.1109/CEIDP.2008.4772867
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Kinetic theory Ceramics Electron beams Numerical simulation Electron emission Electron traps Pulse measurements Scanning electron microscopy Current measurement Q measurement
Content Type	Text
Resource Type	Article

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