NDLI: MEMS: technology, design, CAD and applications

Content Provider	IEEE Xplore Digital Library
Author	Lal, R. Apte, P.R. Bhat, N.K. Bose, G. Chandra, S. Sharma, D.K.
Copyright Year	2002
Description	Author affiliation: Indian Inst. of Technol., Bombay, India (Lal, R.)
Abstract	Summary form only given. Micromachined electro-mechanical systems(MEMS), also called microfabricated systems (MS), have evoked great interest in the scientific and engineering communities. This is primarily due to several advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, virtually zero dc power consumption and potentially large reduction in power consumption, etc. The application domains cover microsensors and actuators for physical quantities (MEMS), of which MEMS for automobile and consumer electronics forms a large segment; microfabricated subsystems for communications and computer systems (RF-MEMS and MOMS); and microfabricated systems for chemical assay (microTAS) and for biochemical and biomedical assay (bioMEMS and DNA chips). This tutorial gives an introduction to these exciting developments and the technology and design approaches for the realization of these integrated systems. The tutorial gives an overview of the area, highlights some of the challenges and outlines the scope of the tutorial. It would be followed with an introduction to the design of microsensors, such as the pressure sensor and the accelerometer, that began the MEMS revolution.
Sponsorship	VLSI Soc. India (VSI)
Starting Page	24
Ending Page	25
File Size	189028
Page Count	2
File Format	PDF
ISBN	0769514413
DOI	10.1109/ASPDAC.2002.994879
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-01-11
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Design automation Energy consumption Microsensors Power engineering and energy Fabrication Application software Actuators Automobiles Consumer electronics
Content Type	Text
Resource Type	Article

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