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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhan Chen Koren, I. |
| Copyright Year | 1996 |
| Description | Author affiliation: Dept. of Electr. & Comput. Eng., Massachusetts Univ., Amherst, MA, USA (Zhan Chen) |
| Abstract | As semiconductor technology enters the deep submicron era, reliability has become a major challenge in the design and manufacturing of next generation VLSI circuits. In this paper we focus on one reliability issue-the antenna effect in the context of 3-layer channel routing. We first present an antenna effect model in 3-layer channel routing and, based on this, an antenna effect cost function is proposed. A layer reassignment approach is adopted to minimize this cost function and we show that the layer reassignment problem can be formulated as a network bipartitioning problem. Experimental results show that the antenna effect can be reduced considerably by applying the proposed technique. Compared with previous work, one advantage of our approach is that no extra channel area is required for antenna effect minimization. We show that layer reassignment technique can be used in yield-related critical area minimization in 3-layer channel routing as well. The trade-off between these two objectives is also presented. |
| Starting Page | 77 |
| Ending Page | 85 |
| File Size | 549257 |
| Page Count | 9 |
| File Format | |
| ISBN | 0818675454 |
| ISSN | 10636722 |
| DOI | 10.1109/DFTVS.1996.571996 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1996-11-06 |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Routing Very large scale integration Plasma applications Minimization Circuits Plasma materials processing Etching Target tracking Semiconductor device reliability Cost function |
| Content Type | Text |
| Resource Type | Article |
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