NDLI: Size-dependent analysis and experiments of bulk PMN-PT [001] piezoelectric actuator for MOEMS micro-mirrors

Content Provider	IEEE Xplore Digital Library
Author	Ciubotariu, D.A. Ivan, I.A. Clevy, C. Lutz, P.
Copyright Year	2014
Description	Author affiliation: Ecole Nat. d'Ing. de St.-Etienne (ENISE), Lab. de Tribologie et Dynamique des Syst. (LTDS), Univ. de Lyon, St. Etienne, France (Ivan, I.A.) \|\| AS2M Dept., UFC/ENSMM/UTBM, Besancon, France (Ciubotariu, D.A.; Clevy, C.; Lutz, P.)
Abstract	This paper presents the modeling, fabrication, FEM simulation and validation of a PMN-PT [001], bulk micro-actuator intended for integration in smart Micro-Opto-Electrical-Mechanicals Systems (MOEMS). Unlike the majority of piezoelectric materials, PMN-PT [001] has the ability to generate large-stroke out-of-plane actuation; this is due to its high longitudinal piezoelectric coefficient of up to 4500pm/V. After an introduction on MOEMS actuation, a concise modeling is given. The FEM simulations are then presented, highlighting actuation-induced shape specificities. The focus is placed on planar displacement and on possible shape generation. Actuation reached values as high as 680nm for a 200μm thick layer. Spherical shape generation was also studied. After presenting the fabrication of a basic piezo-patch mirror, the experimental verification is provided, outlining the influence of the contact interface size and nature.
Starting Page	1267
Ending Page	1272
File Size	841171
Page Count	6
File Format	PDF
e-ISBN	9781479957361
DOI	10.1109/AIM.2014.6878256
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-07-08
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Finite element analysis Materials Shape Actuators Optical interferometry Standards Surface fitting
Content Type	Text
Resource Type	Article

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Size-dependent Analysis and Experiments of Bulk PMN-PT [001] Piezoelectric Actuator for MOEMS Micro-Mirrors.

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