NDLI: Structure design and trajectory planning of a precision repetitive-scanning stage with separated drive units for heat-reduction

Content Provider	IEEE Xplore Digital Library
Author	Han Chen Chuxiong Hu Haihua Mu Yu Zhu Tian Cai Ming Zhang
Copyright Year	2014
Description	Author affiliation: Dept. of Mech. Eng., Tsinghua Univ., Beijing, China (Han Chen; Chuxiong Hu; Haihua Mu; Yu Zhu; Tian Cai; Ming Zhang)
Abstract	Precision repetitive-scanning stages which exist in lithographic reticle system, scanning probe microscope, etc, have been widely used in modern precision industry. In such stages, the accelerated and constant-speed motions are both driven by the same motor, where heat generation becomes a potential obstacle for achieving high performance. Considering the motion characteristics of such stages, it would leads to a heat-reduction nature if the accelerated and constant-speed motions are driven by two separated drive units (SDUs). Inspired by this thought, we design a novel precision repetitive-scanning stage specially equipped with a separated permanent-magnetic drive unit for accelerated motion. In order to achieve the desired motion function with the effect of SDUs, a modified repetitive-scanning trajectory is proposed. For this trajectory, a parametric model with simple calculation procedure is significantly provided to match the permanent magnetic drive force, which results in a sufficient utilization of the SDUs' drive ability. Finally, a precision repetitive-scanning stage prototype system is set up. Comparative experimental results demonstrate that the proposed scheme can effectively achieve a desired high motion accuracy and, more importantly, can significantly reduce the heat generation in practical repetitive-scanning motion.
File Size	3601280
Starting Page	859
Ending Page	564
File Format	PDF
e-ISBN	9781479957361
DOI	10.1109/AIM.2014.6878187
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-07-08
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Heating Trajectory Acceleration Force Accuracy Planning Permanent magnet motors
Content Type	Text
Resource Type	Article

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