NDLI: Two axis image-based measurement and control for scanning probe microscopes

Content Provider	IEEE Xplore Digital Library
Author	Clayton, G.M. McManus, B.
Copyright Year	2011
Description	Author affiliation: Department of Mechanical Engineering at Villanova University, USA (Clayton, G.M.; McManus, B.)
Abstract	In this paper, a method for the image-based position measurement of both lateral axes of a scanning probe microscope (SPM) is presented. SPM systems have applications in a broad range of fields, but the operation speed of these devices is limited due to the resonant nature of the nanopositioner (typically piezoelectric) used to position the SPM probe above the sample surface. To overcome this issue a number of feedback and feedforward controllers have been successfully applied. One difficulty in applying these controllers is that they typically require probe-position sensors, which have a number of difficulties including limited resolution and sensor integration. To address these sensor issues, an image-based sensing method, capable of simultaneous measurement of both lateral positions (x and y) of the SPM, is presented and used to enable feedforward control. Specifically, in this method, the trajectory followed while imaging at high-speeds can be determined by analyzing the acquired image. This measured trajectory can then be used to develop a feedforward input that will compensate for the SPM dynamics. To verify the method, simulation results are presented.
Starting Page	640
Ending Page	645
File Size	477320
Page Count	6
File Format	PDF
ISBN	9781457708381
ISSN	21596255
e-ISBN	9781457708398
DOI	10.1109/AIM.2011.6027149
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-07-03
Publisher Place	Hungary
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Trajectory Sensors Probes Spirals Feedforward neural networks Image sensors Position measurement
Content Type	Text
Resource Type	Article

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