NDLI: Electrical parameter data analysis and object-oriented techniques in semiconductor process development

Content Provider	IEEE Xplore Digital Library
Author	Freeman, G. Kierstead, J. Schweiger, W.
Copyright Year	1996
Description	Author affiliation: Adv. Semicond. Technol. Center, IBM Corp., USA (Freeman, G.)
Abstract	Early and rapid assessment regarding the outcome of process experiments on performance and integrity of fabricated devices is critical to the learning process inherent in process development. In-line electrical measurements on test structures play a critical role in this assessment. Interpretation and analysis of data generated from such measurements usually falls short of its potential because of the data storage/retrieval/calculation/and analysis tools available to those required to understand this data. At IBM's Advanced Semiconductor Technology Center, we have taken advantage of object-oriented technologies to develop a system that solves these problems in a single integrated package. Central to this system is an object-oriented "data model" in which engineering domain objects (i.e.: Devices, Measurements, and Calculations) are represented and stored as database objects. This paper reviews the requirements for a parametric electrical database and analysis system, and describes the integral part that these modelled objects play in our implementation of the calculation and analysis routines. Real-life examples are drawn from the SiGe HBT technology supported by this system at the ASTC.
Starting Page	81
Ending Page	88
File Size	966295
Page Count	8
File Format	PDF
ISBN	0780335163
ISSN	10889299
DOI	10.1109/BIPOL.1996.554145
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-09-29
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Data analysis Object oriented modeling Object oriented databases Electric variables measurement Testing Memory Information retrieval Semiconductor device packaging Data engineering Silicon germanium
Content Type	Text
Resource Type	Article

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