NDLI: An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

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An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

Content Provider	IEEE Xplore Digital Library
Author	Chenxu Zhao Leran Wang Kazmierski, T.J.
Copyright Year	2007
Description	Author affiliation: Southampton Univ., Southampton (Chenxu Zhao; Leran Wang; Kazmierski, T.J.)
Abstract	This contribution presents a novel MEMS accelerometer model implemented in VHDL-AMS. The model includes sense finger dynamics, which allow accurate performance prediction of a MEMS accelerometer in a mixed-technology control loop. A distributed mechanical sensing element model is developed and the effect of the sense finger dynamics is analyzed. The sense finger dynamics might cause a failure of the Sigma-Delta control loop which is captured by the proposed model but cannot be correctly modeled using the conventional approach.
Starting Page	143
Ending Page	147
File Size	303172
Page Count	5
File Format	PDF
ISBN	9781424415670
DOI	10.1109/BMAS.2007.4437541
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Accelerometers Fingers Delta-sigma modulation Acceleration Force feedback Predictive models Capacitance Partial differential equations Capacitors
Content Type	Text
Resource Type	Article

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