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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ihlefeld, J.F. Tian, W. Liu, Z.K. Doolittle, W.A. Bernhagen, M. Reiche, P. Uecker, R. Ramesh, R. Schlom, D.G. |
| Copyright Year | 2008 |
| Description | Author affiliation: Department of Materials Science and Engineering, University of California, Berkeley, 94720, USA (Ramesh, R.) || Institute for Crystal Growth, D-12489 Berlin (Adlershof), Germany (Bernhagen, M.; Reiche, P.; Uecker, R.) || Materials Research Institute, The Pennsylvania State University, University Park, 16802, USA (Ihlefeld, J.F.; Tian, W.; Liu, Z.K.; Schlom, D.G.) || School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, 30332, USA (Doolittle, W.A.) |
| Abstract | BiFeO3 thin films have been deposited on (101) DyScO3, (0001) AlGaN/GaN, and (0001) SiC single crystal substrates by reactive molecular-beam epitaxy in an adsorption-controlled growth regime. This is achieved by supplying a bismuth over-pressure and utilizing the differential vapor pressures between bismuth oxides and BiFeO3 to control stoichiometry. Four-circle x-ray diffraction reveals phase-pure, epitaxial films with rocking curve full width at half maximum values as narrow as 7.2 arc seconds (0.002°). Epitaxial growth of (0001)-oriented BiFeO3 thin films on (0001) GaN, including AlGaN HEMT structures, and (0001) SiC has been realized utilizing intervening epitaxial (111) SrTiO3 / (100) TiO2 buffer layers. The epitaxial BiFeO3 thin films have two in-plane orientations: [112¿0] BiFeO3 ¿ [112¿0] GaN (SiC) plus a twin variant related by a 180° in-plane rotation. This epitaxial integration of the ferroelectric with the highest known polarization, BiFeO3, with wide band gap semiconductors is an important step toward novel field-effect devices. |
| Starting Page | 1 |
| Ending Page | 2 |
| File Size | 341819 |
| Page Count | 2 |
| File Format | |
| ISBN | 9781424427444 |
| ISSN | 10994734 |
| DOI | 10.1109/ISAF.2008.4693774 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-02-23 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Wide band gap semiconductors Gallium nitride Silicon carbide Molecular beam epitaxial growth Semiconductor thin films Aluminum gallium nitride Bismuth Sputtering Substrates Pressure control |
| Content Type | Text |
| Resource Type | Article |
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