NDLI: Microring-Resonator Cross-Connect Filters in Silicon Nitride: Rib Waveguide Dimensions Dependence

Content Provider	IEEE Xplore Digital Library
Author	Shengmei Zheng Hui Chen Poon, A.W.
Copyright Year	1995
Abstract	We report a systematic study of monolithic microring-resonator cross-connect filters with various waveguide widths and heights in silicon-nitride-on-silica substrates. Our experiments reveal that for particular deeply etched rib heights and slab heights, the microring-resonance Q factors rise nearly linearly as a function of the submicrometer waveguide width, while the extinction ratios generally drop nonlinearly. From the measurements, we are able to extract the microring loss and the waveguide-microring coupling coefficient at various waveguide widths and heights by using a Fabry-Perot-like model. The trends of the extracted microring loss and coupling coefficient are in qualitative agreement with the trends of the numerically simulated curved rib waveguide bend loss and straight rib waveguide evanescent field amplitude at the coupling distance
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1380
Ending Page	1387
Page Count	8
File Size	378437
File Format	PDF
ISSN	1077260X
Volume Number	12
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-11-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Optical waveguides Resonator filters Resonance Etching Optical resonators Extinction ratio Slabs Q factor Photonics waveguide crossing Cross-connect filters microring resonators rib waveguide silicon nitride silicon photonics
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering

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