NDLI: Development of CMOS-Compatible Integrated Silicon Photonics Devices

Content Provider	IEEE Xplore Digital Library
Author	Nahum Izhaky Morse, M.T. Koehl, S. Cohen, O. Rubin, D. Barkai, A. Sarid, G. Cohen, R. Paniccia, M.J.
Copyright Year	1995
Abstract	This paper surveys technical challenges involved in designing and manufacturing integrated optoelectronic devices in a high-volume complementary metal-oxide-semiconductor (CMOS) microelectronic fabrication facility. The paper begins by introducing the motivations for building these devices in silicon. We discuss the advantages and challenges of both hybrid and monolithic strategies for optoelectronic integration. We then discuss the issues involved in building the devices in a standard CMOS facility, including specific technical examples. These include low-loss waveguides (WGs) for Raman lasers, fast silicon modulators, SiGe heterostructures for infrared photodetection, silicon-oxynitride (SiON) devices on silicon-on-insulator (SOI), silicon optical bench (SiOB) technology, and waveguide tapers. We conclude with a discussion and recommendations for future work in silicon photonics
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1688
Ending Page	1698
Page Count	11
File Size	699361
File Format	PDF
ISSN	1077260X
Volume Number	12
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-11-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Photonics Optical waveguides Buildings Silicon on insulator technology Pulp manufacturing Integrated optoelectronics Microelectronics Optical device fabrication Waveguide lasers Silicon germanium silicon Complementary metal–oxide–semiconductor (CMOS) fabrication integrated manufacturing optoelectronics photonics
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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