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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Dixon Tat-Kun Kwok Oates, T.W.H. McKenzie, D.R. Bilek, M.M.M. |
| Copyright Year | 1973 |
| Abstract | A one-dimensional (1-D) particle-in-cell (PIC) numerical method is developed to determine the equilibrium steady-state sheath width established in a drifting plasma. The simulated and measured steady-state sheath widths are in approximate agreement although the measured width is slightly larger than the simulated. The probe is biased to +90 V and this greatly influences the potential structure within the sheath boundary. The simulation shows that the mean-charge state and mean-atomic-mass approach to dealing with multiple ion species with a range of charge states does not accurately predict the position of the equilibrium sheath when the difference between the charge-to-mass ratios of the ion species is large. A more robust approach is to simulate the steady sheath by a 1-D-PIC method that can handle multiple ion species. In experimental situations where the sample stage is finite in size, the assumption that the equilibrium ion sheath expands from a biased plate of infinite extent may be violated. A two-dimensional PIC numerical method expressed in r-z cylindrical coordinates has been developed to investigate the condition where the 1-D assumption becomes inaccurate. The results confirm that the 1-D-PIC method becomes inaccurate when the steady-state sheath width has dimensions comparable with the sample stage diameter. |
| Sponsorship | IEEE Nuclear and Plasma Sciences Society |
| Starting Page | 1044 |
| Ending Page | 1051 |
| Page Count | 8 |
| File Size | 423681 |
| File Format | |
| ISSN | 00933813 |
| Volume Number | 31 |
| Issue Number | 5 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-10-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Plasma sheaths Plasma simulation Numerical simulation Plasma measurements Plasma immersion ion implantation Steady-state Plasma properties Plasma applications Probes Surface discharges |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nuclear and High Energy Physics Condensed Matter Physics |
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