NDLI: Micromechanical tuning elements in a 620-GHz monolithic integrated circuit

Content Provider	IEEE Xplore Digital Library
Author	Lubecke, V.M. McGrath, W.R. Stimson, P.A. Rutledge, D.B.
Copyright Year	1963
Abstract	While monolithic integrated-circuit technology promises a practical means for realizing reliable reproducible planar millimeter and submillimeter-wave circuits, conventional planar circuits do not allow for critical post-fabrication optimization of performance. A 620-GHz quasi-optical monolithic detector circuit is used here to demonstrate the performance of two integrated micromechanical planar tuning elements. This is the first reported demonstration of integrated micromechanical tuning at submillimeter wavelengths. The tuning elements, called sliding planar backshorts (SPBs), are used to adjust the electrical length of planar transmission-line tuning stubs to vary the power delivered between a substrate-lens coupled planar antenna and a thin-film bismuth detector over a range of nearly 15 dB. The circuit performance agrees with theoretical calculations and microwave measurements of a -0.06-dB reflection coefficient made for a scale model of the integrated tuners. The demonstrated tuning range for the SPB tuners indicates that they can be valuable for characterizing components in developmental circuits and for optimizing the in-use performance of various millimeter and submillimeter-wave integrated circuits.
Sponsorship	IEEE Microwave Theory and Techniques Society
Starting Page	2098
Ending Page	2103
Page Count	6
File Size	348295
File Format	PDF
ISSN	00189480
Volume Number	46
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Circuit optimization Submillimeter wave integrated circuits Detectors Tuners Integrated circuit technology Integrated circuit reliability Submillimeter wave technology Submillimeter wave propagation Transmission lines
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

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