NDLI: Effect of sputtering conditions, annealing and the microstructure of Cr underlayer on the magnetic properties of CoNiCr/Cr thin films

Content Provider	IEEE Xplore Digital Library
Author	Duan, S.L. Artman, J.O. Lee, J. Wong, B. Laughlin, D.E.
Copyright Year	1965
Abstract	The effects of RF power P, substrate heating, and substrate bias V/sub b/ on the structure and magnetic properties of CoNiCr thin films were studied. The films were deposited on glass and Cr/glass substrates by RF diode sputtering. For films deposited at higher P and at elevated substrate temperature T/sub s/, the grain size increased. The texture in the Cr underlayer increased at higher Ts; this was accompanied by an increase in the texture in the CoNiCr film. In-plane coercivity H/sub c/ also increased with P and T/sub s/; this is probably related to the increase in grain size as well as in CoNiCr texture. In the samples deposited with an applied V/sub b/, the grains were considerably larger than in those prepared without bias. The H/sub c/ value and the magnetic domain morphology also changed with V/sub b/; this is probably related to the increase in grain size. The H/sub c/ of CoNiCr thin films also increased following annealing in vacuum.<>
Sponsorship	IEEE Magnetics Society
Starting Page	3884
Ending Page	3886
Page Count	3
File Size	495924
File Format	PDF
ISSN	00189464
Volume Number	25
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1989-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sputtering Annealing Microstructure Substrates Magnetic films Grain size Radio frequency Glass Chromium Heating
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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