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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jungkeun Choi Seokbeom Kim Jungchul Lee Bumkyoo Choi |
| Copyright Year | 2001 |
| Abstract | This letter reports sensitivity-improved capacitive pressure sensors fabricated using liquid alloy and highly compliant silicon elastomer. Multilayer elastomer layers prepared by replica moulding were stacked and bonded to form three isolated disk-shaped cavities whose diameters are 3 or 5 mm. Top and bottom cavities (both are 200-μm tall) were filled with eutectic gallium-indium to realize compliant parallel electrodes. The cavity in the middle (1-mm tall) was left empty to make it compressed with applied pressure. The overall diameter and height of fabricated pressure sensors are 6 or 7.5 mm and 4 or 6 mm, respectively. After fabricated liquid alloy capacitive pressure sensors were connected with external inductors to construct LC resonant circuits, their resonance frequencies were characterized with applied pressures ranging from 0 to 10 kPa. We found that liquid-alloy capacitive pressure sensors exhibit improved sensitivities over identically sized sensors with solid electrodes. |
| Sponsorship | IEEE Sensors Council |
| Starting Page | 4180 |
| Ending Page | 4181 |
| Page Count | 2 |
| File Size | 905566 |
| File Format | |
| ISSN | 1530437X |
| Volume Number | 15 |
| Issue Number | 8 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-01-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Capacitive sensors Electrodes Cavity resonators Solids Sensor phenomena and characterization Metals Silicone elastomer Capacitive pressure sensor Eutectic gallium-indium (EGaIn) Liquid alloy silicone elastomer eutectic gallium-indium (EGaIn) liquid alloy |
| Content Type | Text |
| Resource Type | Article |
| Subject | Instrumentation Electrical and Electronic Engineering |
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