NDLI: Maskless Wet Etching Silicon in Iodine-Supersaturated KOH Solution

Content Provider	IEEE Xplore Digital Library
Author	Jianqiang Han Yimao Yu Sen Li Qing Li
Copyright Year	2001
Abstract	Although maskless wet etching of silicon has been proposed for about two decades, it is not widely used as yet because of rough fast-etching planes etched in KOH-based etchants or lager ratio (r₃) between the etching rates of the fast-etching crystal plane and (001) planes etched in TMAH-based etchant. In this paper, the maskless wet etching characteristics of silicon in various etchants are experimental studied. It is found that the fast-etching planes etched in iodine-supersaturated KOH solution are smooth and the intersectant lines of (001) crystal planes and fast-etching planes are straight. The ratio between the etching rates of the fast-etching crystal planes and (001) planes etched in iodine-supersaturated KOH solution is smaller than that of other etchants. The deviation of r₃ in iodine-supersaturated KOH solution is also the smallest among all etchants. In addition, experiments demonstrate that iodine-supersaturated KOH solution has an extremely high stability and durability. All these characteristics prove it satisfies most demands of maskless etching silicon sensors and actuators.
Sponsorship	IEEE Sensors Council
Starting Page	4708
Ending Page	4711
Page Count	4
File Size	1783413
File Format	PDF
ISSN	1530437X
Volume Number	15
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Crystals Wet etching Sensors Accelerometers Iodine-supersaturated KOH solution. Maskless etching Microsensors Fast-etching crystal plane iodine-supersaturated KOH solution microsensors fast-etching crystal plane
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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