NDLI: A Practical Two-Phase Approach to Scheduling of Photolithography Production

Content Provider	IEEE Xplore Digital Library
Author	Ham, A.M. Myeonsig Cho
Copyright Year	1988
Abstract	The introduction of real-time dispatching (RTD) to semiconductor manufacturing has greatly improved productivities for the last two decades. Recently, researchers have revealed that data available and complexity of the algorithms to the dispatcher are limited-in effect the dispatcher has tunnel vision, dutifully rank ordering the lots in the queue, but oblivious to what is happening around it, which leads to the poor results compared to other modern optimization-based approaches. However, the author admits that most semiconductor manufacturing companies are still using RTD not only as a last-minute loading-check, but also as a scheduling logic-hub. Here comes a business need of improving the brainpower of RTD by using the optimization technologies. In this paper, we propose an integration of RTD with linear programming technique in photolithography area by using two-stage modeling. The transportation model at the first stage finds the least-cost means of assigning jobs to reticles and machines. Then, the sequencing module provides an expository sequencing decision by inheriting the same dispatching business rules. The experimental study demonstrates the proposed method can reduce the count of reticle delivery by 40.5% in a low-mix fab instances.
Sponsorship	IEEE Electron Devices Society IEEE Components, Packaging, and Manufacturing Technology Society IEEE Reliability Society IEEE Solid-State Circuits Society
Starting Page	367
Ending Page	373
Page Count	7
File Size	637797
File Format	PDF
ISSN	08946507
Volume Number	28
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Dispatching Lithography Job shop scheduling Sequential analysis Industries Scheduling Litho Reticle mixed integer programming reticle scheduling
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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