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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Seokho Kang Sungzoon Cho Daewoong An Jaeyoung Rim |
| Copyright Year | 1988 |
| Abstract | In semiconductor manufacturing, wafer fabrication is followed by chip assembly where individual dies are assembled as a packaged chip. In between, dies are tested in terms of their electrical properties and those which fail to pass the “wafer test” are filtered out. However, some faulty dies pass the test and cause a packaged chip to fail in the final test. The inaccuracy of the wafer test leads to waste in manufacturing time and cost. In this paper, we propose to predict the result of the final test at the die-level before assembly using wafer test items and four derivations concerning wafer map features: 1) distance of the die from the wafer center; 2) previous final yield at the die position; 3) wafer test fail rate for the adjacent dies; and 4) abnormalities of the wafer map pattern. We build prediction models with these variables using a random forest algorithm. Preliminary experimental results on actual data show that the use of these derived variables improves the prediction performance with a statistical significance, thus merits further investigation. |
| Sponsorship | IEEE Electron Devices Society IEEE Components, Packaging, and Manufacturing Technology Society IEEE Reliability Society IEEE Solid-State Circuits Society |
| Starting Page | 431 |
| Ending Page | 437 |
| Page Count | 7 |
| File Size | 957364 |
| File Format | |
| ISSN | 08946507 |
| Volume Number | 28 |
| Issue Number | 3 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-01-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Predictive models Semiconductor device modeling Input variables Probes Assembly Vegetation random forest die-level failure wafer map feature yield prediction final test wafer test Die-level failure |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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