NDLI: Guided-Mode Resonances in GaN Membrane Grating

Content Provider	IEEE Xplore Digital Library
Author	Zheng Shi Xumin Gao Xin Li Fangren Hu Lopez-Garcia, M. Cryan, M.J. Hongbo Zhu Yongjin Wang
Copyright Year	2009
Abstract	This paper proposes guided-mode resonant GaN grating that are implemented on a GaN-on-silicon wafer structure. Numerical simulations based on rigorous coupled wave analysis (RCWA) are performed to model multiple resonances in thick GaN membranes. Back wafer etching of freestanding GaN membranes is used as a tuning mechanism to manipulate the optical performance in the visible wavelength range. Angular resolved micro reflectance measurements are conducted to characterize the fabricated GaN gratings and show the dependence of guided-mode resonances on the filling factor of the gratings, the membrane thickness, and the polarization of incident beam. The experimental results agree well with numerical simulations. This paper opens the way to fabricate guided-mode resonant GaN grating for many diverse applications.
Starting Page	1
Ending Page	7
Page Count	7
File Size	1233131
File Format	PDF
ISSN	19430655
Volume Number	6
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gratings Gallium nitride Reflectivity Filling Optical device fabrication Optical polarization Optical reflection nanostructure fabrication Subwavelength structures nanostructures
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering

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