NDLI: Highly Scalable NEMS Relays With Stress-Tuned Switching Voltage Using Piezoelectric Buckling Actuators

Content Provider	IEEE Xplore Digital Library
Author	Zaghloul, U. Piazza, G.
Copyright Year	1963
Abstract	This paper reports the design, fabrication, characterization, and scaling analysis of novel buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric actuation. The generated stress from anchored piezoelectric films is employed to buckle a clamped-clamped beam to connect suspended source and drain terminals, while the residual stress in the beam is used to control the actuation voltage. This demonstration is the first of its kind to exploit residual stress to deliver a highly scalable switching mechanism that exhibits low actuation voltage (~1.8V), very fast switching (~80 ns), and uniquely achieves an equivalent electric body bias via mechanical methods. Finite-element analysis and analytical simulations show a linear dependence of the switching voltage on the residual stress, while the voltage versus stress tuning slope is reduced linearly with scaling the piezoelectric film thickness (-16.6 mV/MPa for 10-nm thick aluminum nitride film). A scaling analysis shows that millivolt switching is possible for aggressively miniaturized relays, which highlights the great impact this technology could have on demonstrating ultralow power digital circuits and memories.
Sponsorship	IEEE Electron Devices Society
Starting Page	3520
Ending Page	3528
Page Count	9
File Size	1376056
File Format	PDF
ISSN	00189383
Volume Number	61
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Relays Switches III-V semiconductor materials Residual stresses Voltage measurement Actuators scaling buckling millivolt switching nanoelectromechanical (NEMS) relays piezoelectric residual stress
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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