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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yingying Tang Yang Zhang Fedder, G.K. Carley, L.R. |
| Copyright Year | 2001 |
| Abstract | This article reports a dual probe STM imaging system that doubles traditional STM frame rate and is capable of being scaled up to perform highly parallel STM imaging. A CMOS MEMS probe array is controlled by two off-chip servo loops to generate two STM images simultaneously. A CMOS switched-capacitor transimpedance amplifier (SCTIA) is integrated with the CMOS MEMS probe to locally sense tunneling current and facilitate future extension to much larger arrays. The SCTIA is sampled at the frequency of 166 kHz to produce an ultra-high transimpedance gain of 88 MQ with a tunnel current bandwidth of 40 kHz. Correlated double sampling is utilized to just 25 fA/√Hz. This novel SCTIA is designed and fabricated achieve an extremely low input referred noise current floor of in a 0.35 μm BiCMOS process, with its core SCTIA occupying an area of just 0.02 mm2. |
| Sponsorship | IEEE Sensors Council |
| Starting Page | 2984 |
| Ending Page | 2992 |
| Page Count | 9 |
| File Size | 1538029 |
| File Format | |
| ISSN | 1530437X |
| Volume Number | 13 |
| Issue Number | 8 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-08-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | switched capacitor STM CMOS-MEMS probes transimpedance amplifier |
| Content Type | Text |
| Resource Type | Article |
| Subject | Instrumentation Electrical and Electronic Engineering |
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