NDLI: Microfabricated V-Groove Power Inductors Using Multilayer Co–Zr–O Thin Films for Very-High-Frequency DC

Content Provider	IEEE Xplore Digital Library
Author	Di Yao Levey, C.G. Rui Tian Sullivan, C.R.
Copyright Year	1986
Abstract	V-groove microinductors are designed, fabricated, and tested for operation above 10 MHz. Multilayer nanogranular Co-Zr-O/ZrO₂ magnetic thin films are used as the core material of these inductors, to improve the magnetic performance of the films deposited on the sidewalls of V-grooves and to control eddy-current loss in the core. Prototype V-groove inductors are fabricated in a Si substrate based on optimization results for 7 to 3.3-V, 1-A dc-dc buck converters. The inductors exhibit an inductance of 3.4 nH from 10 to 100 MHz, a dc resistance of 3.83 mΩ, and a quality factor of up to at least 50. The prototype inductors are a promising candidate for high-power-density high-efficiency dc-dc converters. The measured inductor performance indicates that they could be used to make a 7 to 3.3-V, 1-A converter exhibiting a power density of 2.5 W/mm² and an efficiency of 86% at 100 MHz; or a power density of 0.36 W/mm² and an efficiency of 91% at 11 MHz.
Sponsorship	IEEE Power Electronics Society
Starting Page	4384
Ending Page	4394
Page Count	11
File Size	1988447
File Format	PDF
ISSN	08858993
Volume Number	28
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Inductors Electrical resistance measurement Magnetic materials Resistance Magnetic hysteresis Magnetic cores Inductance very-high-frequency (VHF) power conversion High-frequency dc–dc converter inductors microfabricated inductor thin films V-groove
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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