NDLI: Etching Paste for Innovative Solar-Cell Applications

Content Provider	IEEE Xplore Digital Library
Author	Nejati, M. Wen Zhang Lun Huang
Copyright Year	2011
Abstract	This paper reports the development of an etching paste for selective etching of a phosphor silicate glass (PSG) layer, which is used as a mask for the processing of solar cells. The etching paste should thoroughly open a thick PSG layer that has high oxygen content in 2 minutes. Moreover, the paste must be completely water based and etch the PSG layer at room temperature without damaging the silicon surface. One of the applications for this kind of etching paste is making solar cells with a selective emitter structure. In this study, a selective structure with a double-diffusion process is considered. The first PSG layer is created by adding oxygen and POCl₃ gases into the diffusion furnace. By using the ETCH-TEC .Ox etching paste, this oxide-rich PSG layer is locally opened, and the second diffusion without oxygen is carried out. Light and heavy phosphorous doping of silicon leads to locally doped areas with sheet resistances of 100 and 50 Ω/\square, respectively. The opened structures were characterized microscopically and physically. An experiment with 800 wafers in a solar-cell production line of the company MAGI Solar was carried out. Compared with the wafers with a homogeneous emitter, an average increase of +0.52% in absolute efficiency was measured.
Starting Page	669
Ending Page	673
Page Count	5
File Size	702820
File Format	PDF
ISSN	21563381
Volume Number	3
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Etching Silicon Printing Photovoltaic cells Viscosity Shearing SiO2 mask Double diffusion etching paste phosphor silicate glass layer PSG mask selective emitter
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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