NDLI: Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation

Content Provider	IEEE Xplore Digital Library
Author	Kidong Park Namjung Kim Morisette, D.T. Aluru, N.R. Bashir, R.
Copyright Year	1992
Abstract	Microelectromechanical systems (MEMS)-based resonant mass sensors have been extensively studied due to their high sensitivity and small size, making them very suitable for detecting micro- or nanosized particles, as well as monitoring microscaled physical processes. In a range of physical and biological applications, accurate estimation and precise control of the evaporation process of microdroplets are very important. However, due to the lack of appropriate measurement tools, the evaporation process of microdroplets has not been well characterized. Here, we introduce a self-oscillating MEMS mass sensor with a uniform mass sensitivity to directly measure the mass changes of evaporating microdroplets. The mass sensor has a unique spring structure to provide spatially uniform mass sensitivity. The sensor's velocity is fed back to the actuation signal to induce self-oscillation, enabling rapid determination of the resonant frequency. The evaporation rates of single microdroplets of dimethyl sulfoxide and water at various temperatures are obtained. With the measured evaporation rates and the simulated surface area of the microdroplet, the enthalpies of vaporization of both liquids are extracted and found to be in agreement with those in the literature. The method developed in this work can be a valuable tool to enhance our understanding of microscaled physical processes involving rapid mass change, such as evaporation, deposition, self-assembly, cryopreservation, and other biological applications.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	702
Ending Page	711
Page Count	10
File Size	1294312
File Format	PDF
ISSN	10577157
Volume Number	21
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Springs Sensitivity Resonant frequency Frequency measurement Sensor systems Micromechanical devices resonant mass sensor Evaporation microdroplet microelectromechanical systems (MEMS)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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