NDLI: Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack

Content Provider	IEEE Xplore Digital Library
Author	Chenhui Li Hall, G. Difeng Zhu Heng Li Eliceiri, K.W. Hongrui Jiang
Copyright Year	1992
Abstract	We present a 3-D surface profiling method for microlenses that utilizes a Shack-Hartmann wavefront sensor. This method applies to both solid microlenses and liquid-liquid interfaces in liquid microlenses. The wavefront at the aperture stop of a microlens is measured by a Shack-Hartmann wavefront sensor and is then used to calculate the 3-D surface profile of the microlens. Three types of microlenses-a photoresist microlens, a hydrogel-driven tunable liquid lens, and an electrowetting-driven tunable liquid lens-were fabricated and measured. The variable-focus liquid lenses were tested within a wide focal length range. The obtained surface profiles were fitted to spherical and conical surface models to study their geometrical properties. The photoresist microlens was found to be approximately spherical. For the hydrogel-driven microlens, the profile was smooth and nearly spherical at the center but became steep and linear at the aperture edges. The electrowetting-driven liquid lens was also fitted better with the conical model, and its conic constant was determined. The obtained surface profiles were used to estimate the optical properties of microlenses in an optical analysis software package. The comparison between the simulation and experiment results indicated that the accuracy of the estimation is rough and the error could be due to the wavefront measurement and surface fitting approximation.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	530
Ending Page	540
Page Count	11
File Size	1154818
File Format	PDF
ISSN	10577157
Volume Number	21
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lenses Microoptics Optical surface waves Surface waves Resists Optical sensors Optical variables measurement variable focus Electrowetting (EW) hydrogel liquid microlens Shack–Hartmann sensor three-dimensional (3-D) surface profile
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Surface profiling and characterization of microlenses utilizing a Shack-Hartmann wavefront sensor

Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront Sensor (2011)

Micro-Alvarez lenses for a variable dynamic range Shack-Hartmann wavefront sensor

Wavefront measurement with large dynamic range using holographic Shack-Hartmann wavefront sensor

Acoustic energy driven focus-tunable liquid microlens array for Shack-Hartmann wavefront sensor application

The commercially available version of Shack-Hartmann wavefront sensor

Measurement of aberrations in microlenses using a Shack-Hartmann wavefront sensor,” SPIE-Int. Soc. Opt. Eng

Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors

Shack–hartmann multiple spots with diffractive lenses (2011).

Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront Sensor

Similar Documents

Surface profiling and characterization of microlenses utilizing a Shack-Hartmann wavefront sensor

Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront Sensor (2011)

Micro-Alvarez lenses for a variable dynamic range Shack-Hartmann wavefront sensor

Wavefront measurement with large dynamic range using holographic Shack-Hartmann wavefront sensor

Acoustic energy driven focus-tunable liquid microlens array for Shack-Hartmann wavefront sensor application

The commercially available version of Shack-Hartmann wavefront sensor

Measurement of aberrations in microlenses using a Shack-Hartmann wavefront sensor,” SPIE-Int. Soc. Opt. Eng

Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors

Shack–hartmann multiple spots with diffractive lenses (2011).

Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront Sensor