NDLI: 135-GHz Micromachined On-Chip Antenna and Antenna Array

Content Provider	IEEE Xplore Digital Library
Author	Hui Chu Yong-Xin Guo Teck-Guan Lim Yee Mong Khoo Xiangquan Shi
Copyright Year	1963
Abstract	This paper presents the design, fabrication and “on-wafer” characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2× 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for \|S11\| less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2×1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for \|S11\| less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz.
Sponsorship	IEEE Antennas and Propagation Society
Starting Page	4582
Ending Page	4588
Page Count	7
File Size	1356425
File Format	PDF
ISSN	0018926X
Volume Number	60
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Antenna measurements Arrays Antenna arrays Cavity resonators Patch antennas Gain measurement sub-terahertz antennas Micromachining on-chip antennas silicon antennas
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering

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