NDLI: Test Structures for Characterizing the Integration of EWOD and SAW Technologies for Microfluidics

Content Provider	IEEE Xplore Digital Library
Author	Yifan Li Fu, R.Y. Winters, D. Flynn, B.W. Parkes, B. Brodie, D.S. Yufei Liu Terry, J. Haworth, L.I. Bunting, A.S. Stevenson, J.T.M. Smith, S. Mackay, C.L. Langridge-Smith, P.R.R. Stokes, A.A. Walton, A.J.
Copyright Year	1988
Abstract	This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied.
Sponsorship	IEEE Electron Devices Society IEEE Components, Packaging, and Manufacturing Technology Society IEEE Reliability Society IEEE Solid-State Circuits Society
Starting Page	323
Ending Page	330
Page Count	8
File Size	11879990
File Format	PDF
ISSN	08946507
Volume Number	25
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Electrodes Substrates Fabrication Dielectrics Surface acoustic wave devices Performance evaluation test structure Contact angle electro-wetting on dielectric (EWOD) integration surface acoustic wave (SAW)
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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