NDLI: The Dependence of Fatigue in Microelectromechanical Systems on the Environment and the Industrial Packaging

Content Provider	IEEE Xplore Digital Library
Author	Langfelder, G. Dellea, S. Zaraga, F. Cucchi, D. Urquia, M.A.
Copyright Year	1982
Abstract	Fatigue is a cause of failure for micrometer-scale polycrystalline silicon devices subject to a large number of stress cycles during their operation life. Several studies in the last 15 years evidenced delayed failures happening for repetitive applied stresses as low as 50% of the nominal tensile strength. This phenomenon is surprising (polysilicon is a brittle material), and many theories were proposed for its explanation: Although different, all of them agree in that there is a strong dependence on the environmental conditions in which the device is operating. In this paper, a comprehensive study of fatigue on an industrial technology (Thick Epi-Poly Layer for Microactuators and Accelerometers process from STMicroelectronics) is presented to provide guidelines for the design of reliable large-scale devices (accelerometers, gyroscopes, magnetometers, etc.), taking into account fatigue as a reliability issue. The study compares the behavior of devices operating in ambient environment with respect to devices operating in industrial packages, where concentrations of gases are different and, in particular, the percentage of oxygen and water vapor is controlled. It is experimentally shown that the behavior is impressively different, and thus, different guidelines must be followed in the design of devices, depending on their final packaging condition.
Sponsorship	IEEE Industrial Electronics Society
Starting Page	4938
Ending Page	4948
Page Count	11
File Size	1843151
File Format	PDF
ISSN	02780046
Volume Number	59
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Magnetometers Sensors Performance evaluation Micromechanical devices Resonant frequency Gyroscopes Reliability Microelectromechanical systems microelectromechanical systems (MEMS) reliability fatigue gyroscopes magnetometers
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering Computer Science Applications

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