NDLI: Development of a Vector Display System Based on a Surface-Micromachined Micromirror

Content Provider	IEEE Xplore Digital Library
Author	Chong, J. Siyuan He Ben Mrad, R.
Copyright Year	1982
Abstract	This paper presents a small-size low-power portable vector display system. The display system uses a micromirror which consists of a simple two-thin-film structure and is fabricated using a surface-micromachining process, i.e., Polysilicon Multi User MEMS Processes. The micromirror exhibits rotational motion around two axes as well as translational motion through four repulsive-force electrostatic actuating units. The micromirror is free of the “pull-in” effect which is associated with conventional micro electrostatic actuators. The micromirror is operated in a nonresonant mode and is capable of static positioning. Measured data show that the micromirror can achieve an optical scanning angle of ±2.5° in each axis. The measured bandwidth (-3 dB) for each driving unit is 2000 Hz operating at a sinusoidal input voltage of 0-200 V. The settling times of the actuating unit are 2.75 and 3.32 ms with overshoots of 5% and 48% for step inputs of 200 to 0 V and 0 to 200 V, respectively. The portable vector display system is developed through integrating the micromirror, a laser source, the optics, and a microcontroller and is shown to be very effective in displaying complex geometries. Open-loop control methods using lookup table searching, spot dwelling, and scan speed control were developed to control the integrated portable device.
Sponsorship	IEEE Industrial Electronics Society
Starting Page	4863
Ending Page	4870
Page Count	8
File Size	901960
File Format	PDF
ISSN	02780046
Volume Number	59
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromirrors Vectors Laser beams Actuators Measurement by laser beam Voltage measurement Electrostatic actuators Microelectromechanical systems vector graphics display Laser steering micro electrostatic actuator micromirror nonresonant repulsive force
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering Computer Science Applications

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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