NDLI: Parallel-Plate MEMS Variable Capacitor With Superior Linearity and Large Tuning Ratio Using a Levering Structure

Content Provider	IEEE Xplore Digital Library
Author	Chang-Hoon Han Dong-Hoon Choi Jun-Bo Yoon
Copyright Year	1992
Abstract	An innovative and simple method is proposed to achieve ultralinear behavior in a capacitance-versus-voltage response and to obtain a large capacitance tuning ratio in a parallel-plate microelectromechanical systems (MEMS) variable capacitor by moving the plate to an increasing-gap direction. By adopting a levering structure, the common closing-gap motion of the electrostatic actuator was transformed into an increasing-gap movement in order to decrease the capacitance as the actuation voltage was increased. By balancing out the rate that the plate moves up as the actuation voltage increased and the rate that the capacitance decreases as the plate moves up, high linearity was achieved. The proposed MEMS variable capacitor, which was fabricated via metal surface micromachining, showed an excellent linearity factor (LF) of 99.5% in the C-V response, and a capacitance tuning ratio of 134% was achieved in the actual usage range (10-45 V) at a low frequency. When it was operated at 1 GHz, the proposed device demonstrated an LF of 99.5% and a capacitance tuning ratio of 125%.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1345
Ending Page	1354
Page Count	10
File Size	1702360
File Format	PDF
ISSN	10577157
Volume Number	20
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Voltage control Capacitance Actuators Micromechanical devices Linearity variable capacitor Capacitance tuning ratio capacitance-versus-voltage response ( $C$–$V$ response) levering actuator linearity microelectromechanical systems (MEMS)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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