NDLI: Force Rebalance Controller Synthesis for a Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

Content Provider	IEEE Xplore Digital Library
Author	Jian Cui Zhongyang Guo Qiancheng Zhao Zhenchuan Yang Yilong Hao Guizhen Yan
Copyright Year	1992
Abstract	This paper presents a design method of force rebalance control for the sense mode of a micromachined vibratory gyroscope with multiobjective. The control strategy is mainly based on constraining sensitivity margin specifications via numerical optimization approach, which embeds the sense mode in a closed-loop system to possess more robust performance. This paper also provides a quantitative methodology of configuring the system parameters to realize the functional electrostatic force feedback control for the microgyroscope in the case of nonideal coupling and external angular disturbance. Theoretical results predicted by the control loop are shown to be in close agreement with the experimental results using a practical microgyroscope, which indicated a satisfactory performance of the proposed control algorithm. The maximums of the sensitivity function and complementary sensitivity function are measured to be 4.5 and 1 dB, resulting in GM ≥ 7.84 dB and PM ≥ 35°. The gyroscope achieves a scale factor of 7.1 mV/deg/s with nonlinearity of 0.2% which is improved by one order of magnitude compared with that of the open loop. The bandwidth is extended to about 98 Hz from 30 Hz in the open loop. The quadrature error and temperature stability of the scale factor are reduced from - 10.33 to -59.22 dB and from 4858 to 646 ppm/^°C with the force rebalance control, respectively.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1382
Ending Page	1394
Page Count	13
File Size	2182277
File Format	PDF
ISSN	10577157
Volume Number	20
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Robustness Gyroscopes Couplings Electrostatics Resonant frequency Sensitivity Q factor sensitivity margins Closed-loop control electrostatic force rebalance control micromachined vibratory gyroscopes robust performance
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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