NDLI: An Extremely Low Contact-Resistance MEMS Relay Using Meshed Drain Structure and Soft Insulating Layer

Content Provider	IEEE Xplore Digital Library
Author	Yong-Ha Song Dong-Hoon Choi Hyun-Ho Yang Jun-Bo Yoon
Copyright Year	1992
Abstract	This paper presents an electrostatically actuated microelectromechanical systems (MEMS) relay with a stacked-electrode structure having meshed drain electrode and a soft dielectric layer under the contact material to achieve high contact force and low hardness simultaneously, with the aim of providing ultralow contact resistance. In particular, a novel method for laying benzocyclobutene polymer under the contact layer to enlarge the contact area by reducing the effective hardness is proposed and theoretically analyzed. This could reduce the contact resistance by more than half in the case of an Au-Au contact. The fabricated devices have pull-in voltage of 32-43 V, switching time of 25 μs, and current driving capability of 350 mA in a hot-switching condition. Furthermore, the achieved minimum contact resistance is as low as 4 mΩ, which, to our knowledge, is the lowest value reported to date. In addition, negligible variation of contact resistance was observed during 1.4 × 10⁶ hot-switching cycles in a 100-mA current level. The fabricated MEMS relay in the relatively low current of 1 mA was able to operate for more than 100 million cycles without failure before the test was stopped.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	204
Ending Page	212
Page Count	9
File Size	1313531
File Format	PDF
ISSN	10577157
Volume Number	20
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Relays Electrodes Force Gold Contact resistance Materials Micromechanical devices switch effective hardness electrostatic actuator material hardness microelectromechanical systems (MEMS) relay power switching reliability
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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