NDLI: Oscillatory <formula formulatype=inline><tex Notation=TeX>$Q$</tex> </formula> Factor in Film Bulk Acoustic Resonators With Integrated Microfluidic Channels

Content Provider	IEEE Xplore Digital Library
Author	Wencheng Xu Abbaspour-Tamijani, A. Junseok Chae
Copyright Year	2001
Abstract	When a film bulk acoustic resonator (FBAR) is coupled to a liquid layer with thickness comparable to the acoustic wavelength, the Q factor varies in a damped oscillatory pattern with the liquid thickness. This letter reports an analytical modeling and experimental demonstration of this behavior by integrating microfluidic channels to MEMS-based FBARs. It is found that Q assumes its maxima and minima when the channel thickness is an odd multiple of quarter-wavelength and a multiple of half-wave-length, respectively. The microfluidics integrated FBARs achieve a 10 × improvement of Q over fully immersed FBARs, showing the potential of use as high-resolution sensors involving liquids.
Sponsorship	IEEE Sensors Council
Starting Page	2342
Ending Page	2343
Page Count	2
File Size	172774
File Format	PDF
ISSN	1530437X
Volume Number	11
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Film bulk acoustic resonators Microfluidics Impedance Glass Sensors Damping $Q$-factor Acoustic resonators microfluidic channel piezoelectric transducers
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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Oscillatory $Q$ Factor in Film Bulk Acoustic Resonators With Integrated Microfluidic Channels