NDLI: Quick Wafer Alignment Using Feedforward Neural Networks

Content Provider	IEEE Xplore Digital Library
Author	HyungTae Kim KangWon Lee BongKeon Jeon ChangSeop Song
Copyright Year	2004
Abstract	This paper proposes a wafer alignment method using a feedforward neural network (FNN). A wafer is placed on a vacuum table and its misalignment is inspected by a frame grabber. The alignment of the wafer is repeatedly corrected by adjusting its kinematic positions until the misalignment becomes zero. The training set is composed of the misalignment and the xy¿ compensation. Fifteen sets of misalignment data were measured by the conventional alignment method. The FNN has four normalized inputs as mark locations in the field of vision and three normalized outputs for the kinematic compensation. The macro and micro steps share the FNN by means of a multiplexer (MUX) and a scaler. The training rule was back-propagation (BP). The proposed method was applied to a wafer manufacturing machine and its alignment performance was compared with that of conventional methods. The alignment time was reduced by the FNN model which was especially efficient in the case of macroscopic alignment.
Sponsorship	IEEE Robotics and Automation Society
Starting Page	377
Ending Page	382
Page Count	6
File Size	792840
File Format	PDF
ISSN	15455955
Volume Number	7
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Neural networks Feedforward neural networks Kinematics Algorithm design and analysis Manufacturing automation Matrices Multiplexing Semiconductor device modeling Detectors Machine vision wafer mounting Auto loading automatic alignment dicing process precise stage semiconductor manufacturing automation
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering

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