NDLI: Development and Assessment of a Novel Decoupled <emphasis emphasistype=italic>XY</emphasis> Parallel Micropositioning Platform

Content Provider	IEEE Xplore Digital Library
Author	Yangmin Li Qingsong Xu
Copyright Year	1996
Abstract	This paper presents the development and performance assessment procedures for a new XY parallel micropositioning platform (PMP) aiming at a submicrometer accuracy for microscale manipulation. The uniqueness of the proposed micro-parallel platform lies in that it possesses an uncomplicated structure as well as actuation isolation and output motion decoupling properties, which facilitates the adoption of two single-input-single-output controllers. Based on the matrix method, the kinetostatics models of the PMP are established and verified by finite-element analysis. Via system identification, a digital lag--lead compensator is designed to compensate for the hysteresis of each piezoelectric actuator. A feedforward control is then implemented to construct a zero phase error tracking controller. Positioning performance of the PMP in terms of resolution, accuracy, repeatability, and contouring performances of 1-D and 2-D motions has been evaluated by several experimental studies. Experimental results not only validate the effectiveness of the designed controller but also show that both positioning and contouring of the PMP can achieve a submicrometer precision within a specified velocity range.
Starting Page	125
Ending Page	135
Page Count	11
File Size	1406193
File Format	PDF
ISSN	10834435
Volume Number	15
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Portable media players Hysteresis Motion control Piezoelectric actuators Micromanipulators System identification Nanobioscience Optical microscopy Kinematics Fabrication system identification Flexure mechanism micromanipulator motion control parallel mechanism piezoelectric actuation
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering Computer Science Applications

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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