NDLI: Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning

Content Provider	IEEE Xplore Digital Library
Author	Ju-Il Lee Xinghui Huang Chu, P.B.
Copyright Year	1992
Abstract	This paper presents a microelectromechanical systems (MEMS) capacitive position sensor for nanopositioning applications in Probe storage systems. The objective of the sensor system design is to develop a high-precision X-Y linear and rotational position sensor with a minimum sensor area and a large range of movements at high speed. To achieve this, first, a simple sensor noise model scalable with a sensor area was developed, in which all the parasitic capacitances are taken into account. Furthermore, a signal-processing solution was developed to compensate for the nonlinearities caused by rotational disturbances and, at the same time, to generate a rotational position signal for active rotation-control purposes. A MEMS capacitive sensor prototype was constructed with the design of a 13-mum pitch, a 300-mum peak-to-peak linear stroke, and a 3.46-mm² sensor area at a 3-mum gap. The measured sensor noise was 0.2 nm 1sigma, which corresponds to 12 mudeg 1sigma for the fabricated prototype sensor, at 25-kHz bandwidth. Furthermore, the signal linearity was significantly enhanced by the proposed sensor signal processing, with a measured sensor signal nonlinearity of 0.78% for an 80-mum peak-to-peak stroke at 200 Hz. Finally, the capacitive sensor-based dynamic closed-loop X -Y linear and rotational position control of an electromagnetic scanner was successfully demonstrated.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	660
Ending Page	670
Page Count	11
File Size	1198218
File Format	PDF
ISSN	10577157
Volume Number	18
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Capacitive sensors Sensor systems Signal processing Prototypes Microelectromechanical systems Sensor systems and applications Nanopositioning Probes Parasitic capacitance sensor noise model Microelectromechanical systems (MEMS) capacitive sensor nanopositioning probe storage rotational position sensing
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

A High-Performance MEMS Capacitive Strain Sensing System

A Low-Flicker-Noise MEMS Electrothermal Displacement Sensing Technique

A Power-Efficient Capacitive Read-Out Circuit With Parasitic-Cancellation for MEMS Cochlea Sensors

Capacitive Sensor Interface for an Electrostatically Levitated Micromotor

A CMOS MEMS Capacitive Flow Sensor for Respiratory Monitoring

MEMS-Capacitive Pressure Sensor Fabricated Using Printed-Circuit-Processing Techniques

Silicon-carbide MESFET-based 400/spl deg/C MEMS sensing and data telemetry

Interfacing Differential Capacitive Sensors to Microcontrollers: A Direct Approach

Readout Circuits for Capacitive Sensors

Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning

Similar Documents

A High-Performance MEMS Capacitive Strain Sensing System

A Low-Flicker-Noise MEMS Electrothermal Displacement Sensing Technique

A Power-Efficient Capacitive Read-Out Circuit With Parasitic-Cancellation for MEMS Cochlea Sensors

Capacitive Sensor Interface for an Electrostatically Levitated Micromotor

A CMOS MEMS Capacitive Flow Sensor for Respiratory Monitoring

MEMS-Capacitive Pressure Sensor Fabricated Using Printed-Circuit-Processing Techniques

Silicon-carbide MESFET-based 400/spl deg/C MEMS sensing and data telemetry

Interfacing Differential Capacitive Sensors to Microcontrollers: A Direct Approach

Readout Circuits for Capacitive Sensors

Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning