NDLI: Fabrication and Characterization of Small Optical Ridge Waveguides Based on SU-8 Polymer

Content Provider	IEEE Xplore Digital Library
Author	Bo Yang Liu Yang Rui Hu Zhen Sheng Daoxin Dai Qingkun Liu Sailing He
Copyright Year	1983
Abstract	Small SU-8 ridge optical waveguides with an air cladding and a SiO₂ buffer on Si substrate have been realized by using a direct ultraviolet (UV) photolithography technology. The propagation loss measured by the cut-back method is about 0.1 dB/mm (@1550 nm) when the core width is 2.8 ¿m. The bending losses of the present SU-8 optical ridge waveguides are also characterized. The measured results show that the bending loss decreases exponentially as the bending radius increases and the total loss can be reduced effectively by introducing an appropriate offset between two connected sections with different curvatures. A small bending radius (as small as 75 ¿m) is still allowed for the requirement of a small bending loss (< 0.1 dB) when an offset of 0.1 ¿m is introduced. Finally, by using this kind of waveguide, a small 1 × 2 Y-branch power splitter is fabricated and characterized.
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	4091
Ending Page	4096
Page Count	6
File Size	1124783
File Format	PDF
ISSN	07338724
Volume Number	27
Issue Number	18
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical polymers Optical waveguides Optical device fabrication Electromagnetic waveguides Optical refraction Optical variables control Propagation losses Arrayed waveguide gratings Optical buffering Optical losses Y-branch Bending loss polymer propagation loss ridge waveguide SU-8
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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