NDLI: Design of Ultrahigh-<formula formulatype=inline> <tex Notation=TeX>$Q$</tex></formula> 1-D Photonic Crystal Microcavities

Content Provider	IEEE Xplore Digital Library
Author	Qin Chen Archbold, M.D. Allsopp, D.W.E.
Copyright Year	1965
Abstract	Waveguide based 1-D photonic crystal (PC) microcavities in silicon-on-insulator are investigated by 2-D finite-difference time-domain method. Values up to 6.7 times10⁶ for the quality factor (Q) are feasible if the cavities are properly designed. The factors that govern Q are analyzed in both real space and momentum space. Etching down into the SiO₂ layer is found to give more than 20% improvement in Q compared to the structure in which etching is stopped at the oxide layer. Short air gap mirrors are used to reduce the vertical scattering loss. The addition to the Bragg mirrors of tapered periods optimized to produce a cavity mode with a near Gaussian shaped envelope results in a major reduction in vertical loss. A new tapered structure with varying Si block width demonstrates an ultrahigh-Q and relieves the fabrication constraints compared to the conventional air slots tapered structure.
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	233
Ending Page	239
Page Count	7
File Size	291110
File Format	PDF
ISSN	00189197
Volume Number	45
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-03-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Etching Mirrors Photonic crystals Microcavities Silicon on insulator technology Finite difference methods Time domain analysis Q factor Electromagnetic scattering Particle scattering $Q$ -factor Filters finite difference methods microresonators optical resonators
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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