NDLI: A MEMS Device for Studying the Friction Behavior of Micromachined Sidewall Surfaces

Content Provider	IEEE Xplore Digital Library
Author	Jie Wu Shao Wang Jianmin Miao
Copyright Year	1992
Abstract	A microelectromechanical system device fabricated by deep reactive ion etching for friction characterization was developed with single-crystal silicon in this paper. Two orthogonally placed electrostatic comb-drive actuators were adopted to apply the normal load and generate the tangential motion. A sensing plate for sliding contact and a driving plate with two bumps designed for the Hertzian contact are included in the testing device. With an image processing technique developed, experimental displacement data were extracted from the captured video frames. A quasi-static stick-slip model was developed to predict the transitions between static and kinetic friction at the contacting sidewall surfaces. Both static and kinetic friction coefficients can be determined by using this model, and these measured results are shown to be insensitive to errors in the calculation of the electrostatic forces. The measured displacements of the driving and sensing plates are in good agreement with the trend predicted by the model. Based on the Hertz theory, the contact silicon interface has been found to be in an elastic regime at the scale of the designed bumps. With the aid of the quasi-static stick-slip model, a saturation phenomenon of the kinetic friction at the sidewall surfaces was observed while the normal load was increased.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	921
Ending Page	933
Page Count	13
File Size	990016
File Format	PDF
ISSN	10577157
Volume Number	17
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microelectromechanical devices Friction Kinetic theory Silicon Predictive models Electrostatic measurements Microelectromechanical systems Etching Electrostatic actuators Testing surfaces Bulk micromachining contact mechanics deep reactive ion etching (DRIE) friction nanotribology sidewall stick–slip stick¿slip
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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