NDLI: Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper

Content Provider	IEEE Xplore Digital Library
Author	Trinh Chu Duc Gih-Keong Lau Sarro, P.M.
Copyright Year	1992
Abstract	This paper presents the fabrication, characterization, and application of a novel silicon-polymer laterally stacked electrothermal microactuator. The actuator consists of a deep silicon skeleton structure with a thin-film aluminum heater on top and filled polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching, aluminum sputtering, SU8 filling, and KOH etching. The actuator is 360 mum long, 125 mum wide, and 30 mum thick. It generates a large in-plane forward motion up to 9 mum at a driving voltage of 2.5 V using low power consumption and low operating temperature. A novel 2-D microgripper based on four such forward actuators is introduced. The microgripper jaws can be moved along both the x- and y-axes up to 17 and 11 mum, respectively. The microgripper can grasp a microobject with a diameter from 6 to 40 mum. In addition, the proposed design is suitable for rotation of the clamped object both clockwise and counterclockwise.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	823
Ending Page	831
Page Count	9
File Size	1440830
File Format	PDF
ISSN	10577157
Volume Number	17
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Polymers Microactuators Silicon Skeleton Grippers Actuators Fabrication Sputtering Aluminum Sputter etching 2-D microgripper Electrothermal microactuator polymeric microactuator SU8
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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