NDLI: Modeling of Coupled Dome-Shaped Microoscillators

Content Provider	IEEE Xplore Digital Library
Author	Sahai, T. Zehnder, A.T.
Copyright Year	1992
Abstract	Synchronized micromechanical oscillators have potential for applications in signal processing, neural computing, sensing, and other fields. This paper explores the conditions under which coupled nonlinear limit cycle microoscillators can synchronize. As an example of the modeling approach and to be able to obtain results for a system that has been experimentally realized, thermally excited dome oscillators, which are fabricated by buckling of a thin circular film of polysilicon, are modeled. Starting with the von Karman plate equations and an assumed mode shape, a Galerkin projection is performed to obtain an ordinary differential equation for the postbuckled dynamics of the mode. Because the structure is thermally excited, a thermal model is built by solving the heat equation on a disk with appropriate boundary conditions. Bifurcation analysis of the single oscillator model is performed to look for basic underlying phenomena. Conditions under which two slightly detuned coupled limit cycle dome oscillators will synchronize are explored.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	777
Ending Page	786
Page Count	10
File Size	713127
File Format	PDF
ISSN	10577157
Volume Number	17
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Oscillators Limit-cycles Differential equations Micromechanical devices Signal processing Couplings Shape Boundary conditions Bifurcation Performance analysis thermomechanical modeling Buckling coupled oscillators Galerkin projections resonators
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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