NDLI: Harmonic Balance Nonlinear Identification of a Capacitive Dual-Backplate MEMS Microphone

Content Provider	IEEE Xplore Digital Library
Author	Jian Liu Martin, D.T. Nishida, T. Cattafesta, L.N. Sheplak, M. Mann, B.P.
Copyright Year	1992
Abstract	This paper describes the application of a nonlinear identification method to extract model parameters from the steady-state response of a capacitive dual-backplate microelectromechanical systems microphone. The microphone is modeled as a single-degree-of-freedom second-order system with both electrostatic and mechanical nonlinearities. A harmonic balance approach is applied to the nonlinear governing equation to obtain a set of algebraic equations that relate the unknown system parameters to the steady-state response of the microphone. Numerical simulations of the governing equation are also performed, using theoretical system parameters, to validate the accuracy of the harmonic balance solution for a weakly nonlinear microphone system with low damping. Finally, the microphone is experimentally characterized by extracting the system parameters from the response amplitude and phase relationships of the experimental data.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	698
Ending Page	708
Page Count	11
File Size	587942
File Format	PDF
ISSN	10577157
Volume Number	17
Issue Number	3
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Microphones Aerospace engineering Microelectromechanical systems Nonlinear equations Bandwidth Steady-state Damping Noise reduction Noise generators nonlinear identification Harmonic balance method microelectromechanical systems (MEMS) microphone
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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