NDLI: Automated Two-Axes Optical Fiber Alignment Using Grayscale Technology

Content Provider	IEEE Xplore Digital Library
Author	Morgan, B. McGee, J. Ghodssi, R.
Copyright Year	1992
Abstract	In this paper, we report a new method for actuating an optical fiber in two axes. This device enables in package active alignment of an optical fiber towards reducing the time and cost of optoelectronic packaging by eliminating the need for expensive and slow macroalignment machines. Opposing comb-drive actuators with integrated three-dimensional (3-D) wedges (fabricated using grayscale technology) create a dynamic v-groove to alter the horizontal and vertical alignment of an optical fiber cantilever. All structural components are fabricated in silicon using a single lithography and dry-etching step, making the system conducive to batch fabrication, an essential element to minimize the cost of including in-package alignment capabilities. Actuation of a cleaved fiber tip greater than 30 mum in each direction is demonstrated, with automated fiber alignment times on the order of 10s, comparable to those achieved using macroalignment systems. Alignment tolerances are held below 1.25 mum over a 20-by-20-mum actuation area for the first time. The influences of alignment target location, actuation parameters, and alignment algorithm on total alignment time are also presented
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	102
Ending Page	110
Page Count	9
File Size	1305110
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical fibers Gray-scale Actuators Optical device fabrication Packaging machines Costs Optical fiber devices Silicon Lithography Process control grayscale technology Comb-drive actuators fiber alignment
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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