NDLI: Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test

Content Provider	IEEE Xplore Digital Library
Author	Leseman, Z.C. Carlson, S.P. Mackin, T.J.
Copyright Year	1992
Abstract	In this paper, we present experimental measurements of the strain energy release rate for stiction-failed polysilicon microcantilevers using a newly developed single cantilever beam peel test. Our experiments show that dry-contacting microcantilevers adhere exclusively as tip-stuck, "arc-shaped" stiction failures, while adhesion under "wet" conditions generate exclusively "s-shaped" stiction failures. Microcantilevers were "peeled" from the substrate under displacement control using a piezoelectric actuator attached to one end of an array of microcantilever beams. The crack length was monitored using interferometric imaging, and related to the applied displacement using established equations from linear elastic fracture mechanics. The pull-off forces associated with "arc-shaped" stiction failures were an average value of 89.7 nN, for 1000 mum long beams, and an average value of 123 nN for 1500 mum long beams. Adhesion energies for s-shaped failures were measured as 13.7 mJ/m² for IPA released beams and 15.4 mJ/m² for deionized water released beams. These values are in good agreement with previous measurements. The proposed experimental method enables application of a simple fracture mechanics model using a standard specimen geometry. These experiments, using both wet and dry adhesion failure conditions, show that the quality of the adhesive failure depends upon the magnitude of the forces pulling the microcantilever into contact with the underlying substrate
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	38
Ending Page	43
Page Count	6
File Size	1168718
File Format	PDF
ISSN	10577157
Volume Number	16
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Strain measurement Energy measurement Testing Adhesives Structural beams Displacement control Piezoelectric actuators Condition monitoring Equations Solid modeling strain energy Cantilever peel test stiction
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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