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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Worhoff, K. Roeloffzen, C.G.H. de Ridder, R.M. Driessen, A. Lambeck, P.V. |
| Copyright Year | 1983 |
| Abstract | In this paper, the design, fabrication, and application of a highly tolerant polarization-independent optical-waveguide structure suited for operation in the third communication window is presented. The waveguide structure has been optimized toward minimized sensitivity to technological tolerances and low fabrication complexity. The tolerance analysis has been based on the typical processing tolerances of the widely applied silicon-oxynitride technology, being plusmn3times10 -4 in refractive index, plusmn1% in thickness, and plusmn0.1 mum in channel width. The optimized waveguide design fulfills the criterion of a channel birefringence within 5times10-5, including processing tolerance. It also enables a fiber-to-chip coupling loss below 1 dB/facet and is suited for the realization of low-loss bends with a radius down to 600 mum. Based on this waveguide design, a passband-flattened optical wavelength filter with 50-GHz free spectral range has been realized and tested. The measured TE-TM shift of 0.03 nm confirms the polarization dependence of the optical waveguides being as low as 3times10-5 |
| Sponsorship | IEEE Lasers and Electro-Optics Society Optical Society of America |
| Starting Page | 1276 |
| Ending Page | 1283 |
| Page Count | 8 |
| File Size | 598616 |
| File Format | |
| ISSN | 07338724 |
| Volume Number | 25 |
| Issue Number | 5 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-05-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical waveguides Optical polarization Optical filters Optical refraction Optical sensors Optical variables control Optical design Optical device fabrication Tolerance analysis Refractive index tolerance analysis Adiabatic bend optical filter polarization-independent waveguide (PIW) silicon oxynitride |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics |
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